PURPOSE: To eliminate the nonuniformity of a film thickness while maintaining the excellent surface of a spin coating method by providing a rotating device for a material to be coated and a revolving device which revolves the rotating device around a revolving shaft parted from a rotating shaft.

CONSTITUTION: A coating material is first dropped to the center of the material 1 to be coated while the rotation and revolution are held stopped. The rotation is then started so that the coating material spreads over the entire surface of the material 1. The rotation of this time is merely for spreading the coating material over the entire surface and is not intended to obtain a desired film thickness and is, therefore, executed for a short period of time at a relatively low rotating speed. The revolution is then started under the continuation of the rotation. The revolution is selected under the optimum conditions from the viscosity of the coating material and the desired film thickness. The material 1 is coated easily with the uniformly thin film over the entire surface thereof even with fluid having a thixotropic property by using such spin coater.