To provide a spin coating device which can applied for forming a cover layer of an optical recording medium or the like in which protrusion is prevented from being formed at an outer periphery part of a substrate.
A first concave part in which a substrate 1 is incorporated in a spin tray 2 is provided, further, a resin pool 2a being a second concave part is provided along a periphery of the first concave part. The resin pool 2a and the outside of the spin tray 2 are connected by a spill port 2b. The substrate 1 is incorporated in the first concave part, and UV resin is dripped to a central part of the substrate 1. The UV resin is rotated and extended in this state. The UV resin is spreaded to the outside more than the substrate 1, protrusion due to the surface tension is generated at an end plane of the spin tray 2. The UV resin flowing from a gap of an engaging part 7 is collected in the resin pool 2a and discharged to the outside of the spin tray 2 from the spill port 2b.
WATANABE HIDETOSHI
Koichi Mori