To obtain a necessary blade area by preventing space formed by a wafer and a turn table from becoming a kind of closed state and to prevent the drop of a drying speed by obtaining sufficient air quantity in a spin dryer having a ventilation structure on the turn table.

The turn table 73 of the spin dryer is provided with a hub 732 having a fixing part for fixing the hub 732 to a spin shaft 72, a plurality of rod-like spokes 733 radially extended from the hub 732, annular rims 734 formed on the tops of the spokes 733, and a plurality of supporting pieces 731 attached to the rims 734 to support a disc-like work W. Fins 736 are formed on the spokes 733 to discharge air in a space surrounded by the turn table 73, the supporting pieces 731 and the wafer W downwards through apertures formed between respective spokes 733.