Title:
スピンヘッド及びこれに使用されるチャックピン並びに基板処理方法
Document Type and Number:
Japanese Patent JP4953103
Kind Code:
B2
Abstract:
Provided is a spin head for supporting a substrate. The spin head includes a rotatable body, and chuck pins protruding upward from the body and configured to support an edge of a substrate placed at the body when the body is rotated. Each of the chuck pins includes a vertical rod vertically disposed at the body, and a support rod extending from a side of the vertical rod and configured to make contact with the edge of the substrate placed at the body when the body is rotated. When the substrate is rotated, the vertical rod is spaced apart from the edge of the substrate. The contact portion includes a streamlined side surface. The support rod includes a contact portion. The contact portion tapers toward the end of the support rod when viewed from the top of the support rod.
Inventors:
Lee Rain Tin
Dragon
Kim Yun
Dragon
Kim Yun
Application Number:
JP2008261203A
Publication Date:
June 13, 2012
Filing Date:
October 08, 2008
Export Citation:
Assignee:
SEMES CO., LTD.
International Classes:
H01L21/304; H01L21/027; H01L21/306
Domestic Patent References:
| JP2003229399A | ||||
| JP2001044159A | ||||
| JP11163094A | ||||
| JP2001070894A | ||||
| JP2007141449A |
Attorney, Agent or Firm:
Kyosei International Patent Office