To provide a spin head where all chuck pins can maintain contact with a substrate even in the case of high speed rotation and dislocation of a setting position of the chuck pins due to thermal deformation of a spin head body can be prevented.

The spin head includes: a body; the chuck pins installed so that they project upward from the body; and a chuck pin moving unit. The chuck pin moving unit includes: a moving rod 620 which moves the chuck pins between a support position supporting a side of the substrate placed on the body and a standby position detached from the center of the body compared to the support position and is fixed and coupled with the chuck pin so that a space where the substrate is attachably/detachably placed on the body when the chuck pin is in the standby position is given; a rotatable cam 720 having a projection 740 on an outer face so that the chuck pin positioned in the support position can move to the standby position; and a chuck pin restoration unit 780 which independently applies restoring force to the moving rod 620 so that the chuck pins can independently move to a direction toward the support positions from the standby positions.