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Patent Searching and Data


Title:
SPINDLE MECHANISM FOR DRIVING SUBSTRATE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2001252844
Kind Code:
A
Abstract:

To provide a spindle mechanism capable of accelerating rapidly and rotating a rotary cup at high speed while reducing weight and size of a spindle driving part to improve maintenance efficiency.

From a driving gear 31, such as plural small-sized AC servomotors 51, or the like, disposed on an upper surface and a lower surface of a gear box 25, a driving force is transmitted to a main shaft gear 32 fixed to a main shaft 27. Thus, the small-sized AC servomotors 51 can achieve an equivalent torque with a large-sized AC servomotor by used in plural.


Inventors:
UNO HIROSHI
Application Number:
JP2000062110A
Publication Date:
September 18, 2001
Filing Date:
March 07, 2000
Export Citation:
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Assignee:
TATSUMO KK
International Classes:
B23Q5/10; (IPC1-7): B23Q5/10
Attorney, Agent or Firm:
Yasuo Itaya