To provide a spiral contactor with a center side upper part edge of a chip part of the spiral contactor protruded upward and electric connectivity enhanced, as well as its method for manufacturing.
A Cu foil 4 is provided, a conical concave part 4a of which a depth is within a plate thickness of the spiral contactor 2 is formed on a surface of the Cu foil 4 corresponding to a position containing a chip of the spiral contactor 2, a photoresist 5 is adhered or applied on the Cu foil 4 with a photomask 6 covered, and further, light is irradiated on it for exposure, the photoresist 5 is developed, metal plating 7 is applied on the exposed face of the Cu foil 4 from above, the spiral contactor 2 is formed, the photoresist 5 is removed, and then, the photoresist 5 is adhered or applied on a rear face of the Cu foil 4, a photomask 16 is covered to make a hole 4c, light is irradiated on the photomask 6 for exposure and developing, a hole is made on the Cu foil 4 by etching from the rear face of the Cu foil 4, and the photoresist 5 on the rear face of the Cu foil 4 is removed.
FUKUDA HIDEYUKI
MORI KEITARO
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