Title:
SPIRAL INDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JP3161147
Kind Code:
B2
Abstract:
PURPOSE: To improve frequency characteristics by changing the self resonance frequency of a spiral inductance element through constructing the thickness of an insulating film of the interlayer region containing the cross area of a first and a second wiring metal layers different from the thickness of an insulating film of a region other than the interlayer region.
CONSTITUTION: A first wiring metal layer 3 is formed by evaporation on the main surface of a semi-insulating GaAs substrate 1 by way of an insulating film 2a. A second wiring layer 7 is formed by plating on top of that by way of an insulating film 2b, and an earth metal layer 8 is formed by evaporation on the main surface of the opposite side of the substrate 1. When the thickness of the insulating film 2b is changed only with respect to a cross region 9 of the first and second metal wiring layers 3 and 7, the equivalent capacity of the cross region 9 increases in the case of thinning the thickness of the insulating film 2b. From the formula of the relationship of self resonance frequency, the self resonance frequency shifts toward the low frequency side. By selecting a proper thickness of the insulating film 2b, the self resonance frequency can be set in the harmonic zone to fully exert its effectiveness as a harmonic trap, thus improving a desired transmission frequency gain.
Inventors:
Masaaki Nishijima
Osamu Ishikawa
Hiromasa Fujimoto
Masahiro Maeda
Osamu Ishikawa
Hiromasa Fujimoto
Masahiro Maeda
Application Number:
JP9758693A
Publication Date:
April 25, 2001
Filing Date:
April 23, 1993
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L27/01; H01F17/00; H01L21/822; H01L27/04; H01P1/00; H01P3/08; (IPC1-7): H01L27/04; H01L21/822; H01L27/01; H01P1/00; H01P3/08
Domestic Patent References:
| JP62244160A | ||||
| JP60260156A | ||||
| JP6388908A | ||||
| JP61161747A | ||||
| JP6269545A | ||||
| JP463653U |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)