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Patent Searching and Data


Title:
SPIRAL INDUCTOR AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING THE SAME
Document Type and Number:
Japanese Patent JP2002110908
Kind Code:
A
Abstract:

To provide a spiral inductor having a small coupling (capacitance) with a substrate and capable of improving performance of an overall circuit, and to provide a method for manufacturing a semiconductor integrated circuit device having the same.

The spiral inductor 10 comprises a substrate 1, spiral line conductive layers 5 and 7 formed on the substrate 1 and to form a induction element. The inductor 10 further comprises a groove for isolating elements on the surface of the substrate 1, so as to form a protrusion to obtain a dummy element region 12 to control a CMP step on the upper surface on a region except the region directly under the layers 5 and 7.


Inventors:
MINAMI YOSHIHIRO
Application Number:
JP2000295823A
Publication Date:
April 12, 2002
Filing Date:
September 28, 2000
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/822; H01F17/00; H01F41/04; H01L21/02; H01L27/04; H01L27/08; (IPC1-7): H01L27/04; H01L21/822
Attorney, Agent or Firm:
Kazuo Sato (3 others)