Title:
SPLIT ALIGNER
Document Type and Number:
Japanese Patent JP2003043695
Kind Code:
A
Abstract:
To provide an inexpensive split aligner capable of highly accurately forming an insulating layer.
A 1st shutter part 12 equipped with a light projecting window 12a and a 2nd shutter part 13 equipped with a light projecting window 13a are independently rotated, and the rotating position of each shutter part is changed so that a film mask M and a substrate K on an exposure table 60 are segmentarily exposed.
Inventors:
UMEDA RYOICHI
Application Number:
JP2001226035A
Publication Date:
February 13, 2003
Filing Date:
July 26, 2001
Export Citation:
Assignee:
ONO SOKKI CO LTD
International Classes:
G03F7/20; H05K3/00; (IPC1-7): G03F7/20; H05K3/00
Attorney, Agent or Firm:
Hisao Kamata
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