Title:
Split method
Document Type and Number:
Japanese Patent JP5909122
Kind Code:
B2
Inventors:
Minoru Suzuki
Application Number:
JP2012061423A
Publication Date:
April 26, 2016
Filing Date:
March 19, 2012
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B23K26/00; B23K26/36
Domestic Patent References:
| JP63009950A | ||||
| JP60087012A | ||||
| JP2028924A | ||||
| JP2004039931A | ||||
| JP60122113A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
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