Title:
SPM SENSOR AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP3859614
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve a SPM sensor based on a conventional technology, and to provide a method for manufacturing the improved SPM sensor.
SOLUTION: The SPM sensor is manufactured and has a cantilever, a holding element at one end of the cantilever and a sensor chip at the other end of the cantilever. The holding element is made of a photoresist. The cantilever and/or the sensor chip are made of the other material. The photoresist is preferably SU-8, and the other material is preferably silicon, a silicon compound or metals. The manufacturing method also consists of manufacture of a frame having a plurality of SPM sensors. The frame, a holding part and at least the holding element consists of SU-8. The SPM sensor can be manufactured at low cost, and the sensor can be used with the frame disassembled.
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Inventors:
Stephan Luther
Manfred Detterbeck
Theo Hartmann
Manfred Detterbeck
Theo Hartmann
Application Number:
JP2003116970A
Publication Date:
December 20, 2006
Filing Date:
April 22, 2003
Export Citation:
Assignee:
Nano World AG
International Classes:
G01B21/30; G01Q70/14; G01Q70/16; B81B3/00; (IPC1-7): G01N13/16; G01B21/30; G12B21/02
Domestic Patent References:
| JP3053456B2 | ||||
| JP9304411A | ||||
| JP11271015A | ||||
| JP200046717A | ||||
| JP6241777A | ||||
| JP9126833A | ||||
| JP7311207A | ||||
| JP5302829A | ||||
| JP9218208A | ||||
| JP11201978A |
Foreign References:
| WO1999056176A1 | ||||
| US6066265 |
Other References:
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G. Genolet, M. Despont, P. Vettiger, D. Anselmetti, and N. F. de Rooij,"All-photoplastic, soft cantilever cassette probe for scanning force microscopy",Journal of Vacuum Science and Technology B,米国,American Vacuum Society,2000年 3月,第18巻、第2号,p.617-620
G. Genolet, M. Despont, P. Vettiger, U. Staufer, W. Noell, N. F. de Rooij, T. Cueni, M. -P. Bernal, and F. Marquis-Weible,"Micromachined photoplastic probe for scanning near-field optical microscopy",REVIEW OF SCIENTIFIC INSTRUMETNS,米国,American Institute of Physics,2001年10月,第72巻、第10号,p.3877-3879
M. Despont, H. Lorenz, N. Fahrni, J. Brugger, P. Renaud and P. Vettiger,"HIGH-ASPECT-RATIO, ULTRATHICK, NEGATIVE-TONE NEAR-UV PHOTORESIST FOR MEMS APPLICATIONS",IEEE MICRO ELECTRO MECHANICAL SYSTEMS,IEEE,1997年 5月29日,第10回,p.518-522
R. Pechmann, J. M. Koehler, W. Fritzsche, A. Schaper, and T. M. Jovin ,"The Novolever: A new cantilever for scanning force microscopy microfabricated from polymeric materials",REVIEW OF SCIENTIFIC INSTRUMENTS,米国,American Institute of Physics,1994年12月,第65巻、第12号,p.3702-3706
J Thaysen, A D Yalcinkaya, P Vettiger and A Menon,"Polymer-based stress sensor with integrated readout",Journal of Physics D: Applied Physics,英国,INSTITUTE OF PHYSICS PUBLISHING,2002年11月 7日,第35巻、第21号,p.2698-2703
G. Genolet, M. Despont, P. Vettiger, D. Anselmetti, and N. F. de Rooij,"All-photoplastic, soft cantilever cassette probe for scanning force microscopy",Journal of Vacuum Science and Technology B,米国,American Vacuum Society,2000年 3月,第18巻、第2号,p.617-620
G. Genolet, M. Despont, P. Vettiger, U. Staufer, W. Noell, N. F. de Rooij, T. Cueni, M. -P. Bernal, and F. Marquis-Weible,"Micromachined photoplastic probe for scanning near-field optical microscopy",REVIEW OF SCIENTIFIC INSTRUMETNS,米国,American Institute of Physics,2001年10月,第72巻、第10号,p.3877-3879
M. Despont, H. Lorenz, N. Fahrni, J. Brugger, P. Renaud and P. Vettiger,"HIGH-ASPECT-RATIO, ULTRATHICK, NEGATIVE-TONE NEAR-UV PHOTORESIST FOR MEMS APPLICATIONS",IEEE MICRO ELECTRO MECHANICAL SYSTEMS,IEEE,1997年 5月29日,第10回,p.518-522
R. Pechmann, J. M. Koehler, W. Fritzsche, A. Schaper, and T. M. Jovin ,"The Novolever: A new cantilever for scanning force microscopy microfabricated from polymeric materials",REVIEW OF SCIENTIFIC INSTRUMENTS,米国,American Institute of Physics,1994年12月,第65巻、第12号,p.3702-3706
J Thaysen, A D Yalcinkaya, P Vettiger and A Menon,"Polymer-based stress sensor with integrated readout",Journal of Physics D: Applied Physics,英国,INSTITUTE OF PHYSICS PUBLISHING,2002年11月 7日,第35巻、第21号,p.2698-2703
Attorney, Agent or Firm:
Hiroyuki Niwa