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Title:
ばね押し双安定性マイクロ電気機械的系統スイッチ
Document Type and Number:
Japanese Patent JP2005527963
Kind Code:
A
Abstract:
A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a leaf spring and cantilever that extend from the flexible portion of the torsion member. The switching assembly further comprises a first anchoring member mounting the torsion member to the stable structure, and a second anchoring member mounting the leaf spring to the stable structure. In this manner, the leaf spring has a flexible portion between the first and second anchors that can be alternately flexed in opposing directions to deflect the cantilever end in the respective opposing directions. The leaf spring can exhibit a first stable geometry (e.g., a convex geometry) when flexed in one of the opposite directions, and a second stable geometry (e.g., a concave geometry) when flexed in another of the opposite directions. Thus, the switch can be switched between two stable states using a momentary force and can maintain these two stable states without further expenditure of energy.

Inventors:
Prof. Eric M
Application Number:
JP2004519547A
Publication Date:
September 15, 2005
Filing Date:
May 09, 2003
Export Citation:
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Assignee:
SUPERCONDUCTOR TECHNOLOGIES INCORPORATED
International Classes:
B81B3/00; H01H1/00; H01H1/26; H01H50/32; H01H50/60; H01H51/10; H01H57/00; H01H59/00; H01H61/00; H01H50/00; (IPC1-7): H01H50/60; B81B3/00; H01H1/26; H01H50/32; H01H51/10
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto