Title:
END POINT DETECTOR
Document Type and Number:
Japanese Patent JP3153397
Kind Code:
B2
Abstract:
PURPOSE: To prevent a state that the airtightness of a seal member such as an O-ring or the like installed around a window part in order to ensure the airtightness of a treatment chamber is obstructed when the seal member is thermally deformed and to enhance the heating efficiency of a heating device when the heating device which is used to prevent a reaction product from adhering is installed at the window part used to monitor plasma luminescence inside the treatment chamber.
CONSTITUTION: A heat-conduction separating groove 59 is formed in a light- transmitting member 46 in such a way that it is situated between an O-ring 45 which is installed in the sidewall 1a of a treatment chamber and which is arranged and installed around an opening part 42 and a cartridge heater 53 which is installed in the light-transmitting member 46 in a window part 41. Thereby, since linear heat conduction from the cartridge heater 53 is cut off by the heat-conduction separating groove 59, the O-ring 45 is not deformed thermally, and the heating efficiency of the heater is enhanced by a portion which has been cut off.
Inventors:
Eguchi, Kazuo
Application Number:
JP26586693A
Publication Date:
April 09, 2001
Filing Date:
September 28, 1993
Export Citation:
Assignee:
TOKYO ELECTRON LTD
TOKYO ELECTRON YAMANASHI KK
TOKYO ELECTRON YAMANASHI KK
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; C23F4/00
Attorney, Agent or Firm:
金本 哲男 （外１名）