Title:
スパッタパレット装着装置
Document Type and Number:
Japanese Patent JP3816056
Kind Code:
B2
Abstract:
A sputter pallet loading and unloading device includes in one embodiment a spindle that rotates the pallet while an arm is engaged with the spring in the pallet to open and close the spring. In another embodiment, the spindle is located adjacent an air track that moves the disk substrate over a cushion of air to the loading area of the pallet. The air pressure under the disk substrate is increased to raise the disk substrate into the loading area. Once raised into the loading area, the spring is closed, e.g., by rotating the pallet in the opposite direction. The pallet and air-track are at a small angle to allow the substrate to slide into the correct position. The simplicity of operation leads to a reduced cost and a higher throughput for this device compared to a robotic loader.
Inventors:
Adam Johann F
Cromwell Evan F
Cromwell Evan F
Application Number:
JP2002573338A
Publication Date:
August 30, 2006
Filing Date:
March 12, 2002
Export Citation:
Assignee:
Toda Citron Technologies Inc.
International Classes:
B65G49/05; G11B7/26; B65G49/07; C23C14/56; G11B5/84; G11B23/00; H01L21/677; H01L21/683; G11B17/08; G11B17/22
Domestic Patent References:
| JP5094267U | ||||
| JP53014348B1 | ||||
| JP57114223A | ||||
| JP2001011625A |
Attorney, Agent or Firm:
Kazuhiko Okada