PURPOSE: To accomplish sputtering on many sheets of substrates simultaneously to a uniform distribution in film thickness by erecting and holding the substrates to be rotated in a vacuum vessel on and by an annular holding member in the vacuum vessel made in a cylindrical shape.

CONSTITUTION: A substrate holding member 13 formed into an annular shape is provided freely rotatably along the outside wall of a vacuum vessel 10, and substrates 17, 17... are erected between upright columnar bodies 15, 15 and are held in said member. Cr or the like is scattered from a cathode 21 and is stuck onto te substrates 17 while the member 13 is rotated by a motor 18. The peripheral speed of the substrates 17 is constant and therefore the films are formed in a uniform layer and the number of the substrates 17 is increased to about 12 sheets as compared to about 5 sheets in the prior art wherein the substrates are placed horizontally on a disc.