Title:
Sputtering system
Document Type and Number:
Japanese Patent JP5969856
Kind Code:
B2
Inventors:
Koji Haneda
Yoshinobu Okamoto
Mitsuo Inoue
Yoshinobu Okamoto
Mitsuo Inoue
Application Number:
JP2012178720A
Publication Date:
August 17, 2016
Filing Date:
August 10, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
C23C14/44; C23C14/56; H01L21/31
Domestic Patent References:
| JP7018433A | ||||
| JP2011179061A | ||||
| JP2005163151A | ||||
| JP2005163150A | ||||
| JP8325727A |
Foreign References:
| WO2010023878A1 | ||||
| US5824158 | ||||
| US20110203922 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita