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Title:
スパッタリングターゲットとその製造方法
Document Type and Number:
Japanese Patent JP4574949
Kind Code:
B2
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Inventors:
Takashi Watanabe
Toru Komatsu
Application Number:
JP2003005964A
Publication Date:
November 04, 2010
Filing Date:
January 14, 2003
Export Citation:
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Assignee:
Toshiba Corporation
International Classes:
B22F3/10; C23C14/34; B22F3/15; C22C1/04; C22C27/04; H01L21/28; H01L21/285
Domestic Patent References:
JP2001295035A
JP7062528A
JP2003226966A
JP2002356733A
JP11036067A
JP2001295038A
Foreign References:
WO1995016797A1
Other References:
高阪泰郎,スパッタリングターゲット,東芝技術公開集,日本,2001年,Vol.19-2,Page.11-13
高阪泰郎,スパッタリングターゲット,東芝技術公開集,日本,2001年,Vol.19-58,Page.141-144
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office
Saichi Suyama



 
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