Title:
スパッタリングターゲット及びその製造方法
Document Type and Number:
Japanese Patent JP6436006
Kind Code:
B2
Inventors:
Keita Umemoto
Zhang Mamoru
Zhang Mamoru
Application Number:
JP2015135119A
Publication Date:
December 12, 2018
Filing Date:
July 06, 2015
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C23C14/34; B22F3/10; B22F3/14; B22F3/15; C22C1/04; C22C9/00; C22C28/00
Domestic Patent References:
| JP10270733A | ||||
| JP10150212A | ||||
| JP2012507631A | ||||
| JP2011214140A | ||||
| JP2012031508A |
Foreign References:
| US20100116341 | ||||
| WO2014077110A1 |
Attorney, Agent or Firm:
Kageyama Shuichi
Kurachi Yasuyuki
Kurachi Yasuyuki