Title:
SPUTTERING TARGET AND RECORDING MATERIAL OF HARD DISK FORMED FROM THE SPUTTERING TARGET
Document Type and Number:
Japanese Patent JP2012102399
Kind Code:
A
Abstract:
To provide a sputtering target containing the combination of oxides which forms a recording layer of high definition and high recording density, and a recording material of a hard disk.
The sputtering target basically comprises an alloy of cobalt-platinum (CoPt), cobalt-chrome-platinum (CoCrPt) or cobalt-chrome-platinum-boron (CoCrPtB), wherein silica oxide (SiO2) and Cr2O3 are added as an oxygen supplier during sputtering process to donate oxygen to the oxygen defects, and wherein the amount of silica oxide (SiO2) ranges from 4 to 8 atom% and the amount of chromium oxide (Cr2O3) ranges from 0.8 atom% to 5 atom%.
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Inventors:
LIU WEN-TSANG
LIN SHOU-HSIEN
LIN SHOU-HSIEN
Application Number:
JP2011235432A
Publication Date:
May 31, 2012
Filing Date:
October 26, 2011
Export Citation:
Assignee:
SOLAR APPLIED MAT TECH CORP
International Classes:
C23C14/34; G11B5/64; G11B5/851
Domestic Patent References:
JP2009215617A | 2009-09-24 | |||
JP2010244657A | 2010-10-28 | |||
JP2007164826A | 2007-06-28 | |||
JP2010102816A | 2010-05-06 |
Foreign References:
US20100255348A1 | 2010-10-07 |
Attorney, Agent or Firm:
▲吉▼川 俊雄
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