Title:
スパッタリングターゲット及び透明導電膜及び透明導電ガラス基板
Document Type and Number:
Japanese Patent JP4548651
Kind Code:
B2
Inventors:
Kazuyoshi Inoue
Masato Matsubara
Shigekazu Sakai
Masato Matsubara
Shigekazu Sakai
Application Number:
JP2004132621A
Publication Date:
September 22, 2010
Filing Date:
April 28, 2004
Export Citation:
Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C23C14/08; G02F1/1343; C23C14/34; G02F1/1368; H01B5/14; H01L21/28; H01L21/285; H01L21/3205; H01L23/52; H01L29/786
Domestic Patent References:
| JP9150477A | ||||
| JP7258826A | ||||
| JP2003105532A | ||||
| JP2000072526A | ||||
| JP7054133A |
Attorney, Agent or Firm:
Mitsuru Ito