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Patent Searching and Data


Title:
Sputtering target
Document Type and Number:
Japanese Patent JP5947697
Kind Code:
B2
Inventors:
Tajima hope
Kazuaki Ebata
Nishimura Asami
Application Number:
JP2012232406A
Publication Date:
July 06, 2016
Filing Date:
October 19, 2012
Export Citation:
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Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C23C14/34; C04B35/00; C04B35/453; H01L21/28; H01L21/285; H01L21/336; H01L21/363; H01L29/786
Domestic Patent References:
JP2005307269A
JP2012151469A
Foreign References:
WO2001038599A1
WO2011132418A1
Attorney, Agent or Firm:
Kihei Watanabe
Yuko Tanaka
Takeshi Sato



 
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