Title:
MEMBER FOR APPARATUS FOR PRODUCING SEMICONDUCTOR OR LIQUID CRYSTAL
Document Type and Number:
Japanese Patent JP3046288
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a ceramic sintered compact member having corrosion resistance to halogen-containing corrosive gases and their plasmas and also having thermal shock resistance by using a yttria-alumina compound as the principal crystal phase and incorporating a specified amount of zirconia containing ceria as a stabilizer.
SOLUTION: The member has YAG or a YAG-alumina or YAG-yttria mixed phase as the principal crystal phase and contains 500-50,O00 ppm zirconia containing ≥1 wt.% ceria based on 100 wt.% zirconia. The member preferably has ≤10 μm grain diameter and ≤0.2% porosity. Halogen-containing corrosive gases are fluorine-containing gases such as SF6 and CF4, chlorine-containing gases such as Cl2 and HCl and bromine-containing gases such as Br2 and HBr. Such a gas is converted into plasma when microwaves or high-frequency is introduced in an atmosphere of the gas. The member is used for parts of the internal chamber 1 of an etching device and a clamp ring 2 exposed to such a gas and its plasma.
Inventors:
Nakahara, Masahiro
Application Number:
JP1998000371726
Publication Date:
March 17, 2000
Filing Date:
December 28, 1998
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
C04B35/44; (IPC1-7): C04B35/44