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Title:
STAGE APPARATUS, EXPOSURE APPARATUS USING THE SAME, AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2011134946
Kind Code:
A
Abstract:

To provide a stage apparatus which prevents a gap from being generated between a supporting means that supports the rear surface of a holding means for holding a substrate, and the rear surface, when adjusting the flatness of the substrate.

The stage apparatus includes: a bearing means which supplies air between the rear surface of the holding means and the supporting means so as to lift the holding means from the supporting means; a detecting means which detects the flow rate of the air supplied by the bearing means; and a control means which controls the drive of the supporting means. The control means controls the drive of the supporting means so that the flow rate detected by the detecting means falls within a predetermined flow rate range when the holding means is lifted by the bearing means.


Inventors:
Sone, Kazuo
Application Number:
JP2009000294289
Publication Date:
July 07, 2011
Filing Date:
December 25, 2009
Export Citation:
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Assignee:
CANON INC
International Classes:
H01L21/68; F16C32/06; G03F7/20; H01L21/027
Domestic Patent References:
1993-09-03
1988-10-27
2009-09-24
1999-06-22



 
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