To provide a stage apparatus for a table coater which can prevent the occurrence of application nonuniformity by minute vibration.
In the stage apparatus, a nozzle part 60 is transported uniaxially above a substrate table 30 arranged on a stone surface plate 20 installed on a frame 10 by a slider. The slider includes two Y-axis driving mechanisms 40A and 40B by two linear motors having movable parts which can travel along two rail parts 21A and 21B installed to extend uniaxially in parallel with each other on both sides of the stone surface plate. The yoke part of each linear motor is arranged along the rail parts through arm parts 11A and 11B extending uniaxially which are set to be separated structurally from the stone surface plate, and at least one vibration removing unit 25 is installed between the frame and the stone surface plate.
Kagihiro, Mokoto
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