To simplify the configuration of a stage mechanism capable of moving in two directions.
A stage base 20 comprises a movable part 21, a stationary part 22 and a support part 23. The movable part 21, the stationary part 22 and the support part 23 are formed integrally. The whole of the state base 20 is made up of an elastic material. The movable part 21 is made up in the form of a quadrangular plate. The stationary part 22 is made up in the form of a frame surrounding the periphery of the movable part. The support part 23 is connected to the movable part 21 and the stationary part 22. The support part 23 is composed of four arm portions and four bending portions. A fist bending portion is connected to the movable part 21. The bending portion opposite to the first bending portion is connected to the stationary part 22. First and second piezo-electric elements 14a, 14b are held on the movable part 21 and the stationary part 22 so as to be sandwiched.
Hiroki Ogura
Tsuyoshi Nonaka
Shigeru Torayama
Tsubouchi Shin