Title:
STAGE CONTROLLING APPARATUS, ALIGNER, AND STAGE CONTROLLING METHOD
Document Type and Number:
Japanese Patent JP2004014757
Kind Code:
A
Abstract:
To provide a stage controlling apparatus which is capable of shortening a time required for moving a stage without having an adverse effect such as vibrations even when a travel distance of the stage is short, and to provide an exposure system and a stage control method.
The stage control device is equipped with an acceleration controller (controller 2) which is capable of performing acceleration control of the stage as an object of control, varying the ratio of the acceleration time T1 to a time Tb1 occupying a part of the acceleration time T1, in which the stage moves, and keeping its acceleration nearly constant corresponding to the travel distance of the stage.
Inventors:
TANAKA TOSHIHISA
Application Number:
JP2002165430A
Publication Date:
January 15, 2004
Filing Date:
June 06, 2002
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/22; H01L21/027; (IPC1-7): H01L21/027; G03F7/22
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi