Title:
STAGE DEVICE, ALIGNER, DEVICE MANUFACTURING METHOD AND MOVEMENT GUIDE METHOD
Document Type and Number:
Japanese Patent JP2002252166
Kind Code:
A
Abstract:
To reduce adverse effects due to pipings to a movable body.
This stage device has a board, having a reference surface parallel to the first direction and the second direction, a driving body movable in the first direction, the movable body movable in the second direction, a hydrostatic pressure bearing provided at the movable body, an exhaust groove provided in the periphery of the hydrostatic pressure bearing, and a mechanism for receiving and delivering the gas of the hydrostatic pressure bearing recovered by the exhaust groove between the movable body and the driving body. This stage device is capable of precisely reducing wiring to the movable body for positioning the movable body.
Inventors:
SAKINO SHIGEO
INOUE MITSURU
KUBO TADAYUKI
INOUE MITSURU
KUBO TADAYUKI
Application Number:
JP2001052136A
Publication Date:
September 06, 2002
Filing Date:
February 27, 2001
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; H01J37/20; H01L21/027; H01L21/68; G12B5/00; (IPC1-7): H01L21/027; G03F7/20; G12B5/00; H01L21/68
Domestic Patent References:
| JPH09280251A | 1997-10-28 | |||
| JPH0569256A | 1993-03-23 | |||
| JP2001020951A | 2001-01-23 | |||
| JPH05283321A | 1993-10-29 |
Foreign References:
| WO1999066221A1 | 1999-12-23 | |||
| WO2000049303A1 | 2000-08-24 | |||
| WO2000025352A1 | 2000-05-04 |
Attorney, Agent or Firm:
Keizo Nishiyama (1 person outside)