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Title:
STAGE DEVICE AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2006245299
Kind Code:
A
Abstract:

To realize electric mounting by reducing electric cables and connectors on a structure supporting a sensor and an actuator.

A device has the structure 1 supporting an electric component such as the actuator and the sensor. A printed wiring pattern 11 and an insulting film 13 for protecting the printed wiring pattern are formed on the surface of the structure 1. The printed wiring pattern is formed on two or above continuous faces of one structure.


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JP5020251A method of forming a support on which a shape such as a lithography mask is mounted.
Inventors:
OISHI SHINJI
Application Number:
JP2005059153A
Publication Date:
September 14, 2006
Filing Date:
March 03, 2005
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
JPH11261264A1999-09-24
JP2001183689A2001-07-06
JP2001148188A2001-05-29
JP2003243294A2003-08-29
JPH08243866A1996-09-24
JP2000223411A2000-08-11
JP2003166053A2003-06-13
JP2002261100A2002-09-13
Foreign References:
WO2001074592A12001-10-11
Attorney, Agent or Firm:
Tetsuya Ito
Kazunori Saito



 
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