Title:
STAGE DEVICE, LITHOGRAPHY DEVICE, ARTICLE MANUFACTURING METHOD, AND CONTROL METHOD
Document Type and Number:
Japanese Patent JP2021177688
Kind Code:
A
Abstract:
To provide a technique advantageous for driving a stage with high accuracy.SOLUTION: A stage device comprises: a motor having a stator and a movable element; a stage provided on the movable element; a member defining a reference movable region of the movable element relative to the stator; and a control unit for generating information indicating a compensation value for thrust ripples of the motor in accordance with a relative position to the stator and the movable element, and controlling driving of the movable element in the reference movable region on the basis of the information. The control unit changes the reference movable region to a temporary movable region including an outside region of the reference movable region by shifting the stator with respect to the member, and generates the information by performing processing of measuring the thrust ripples while moving the movable element in the temporary movable region.SELECTED DRAWING: Figure 1
Inventors:
ITO OSAMU
Application Number:
JP2020082817A
Publication Date:
November 11, 2021
Filing Date:
May 08, 2020
Export Citation:
Assignee:
CANON KK
International Classes:
H02P25/064; G03F7/20; H01L21/677; H01L21/68
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office