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Title:
Stage device
Document Type and Number:
Japanese Patent JP5961930
Kind Code:
B2
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Inventors:
Yutaka Maeda
Hiroshi Nakagawa
Application Number:
JP2011137376A
Publication Date:
August 03, 2016
Filing Date:
June 21, 2011
Export Citation:
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Assignee:
Sinfonia Technology Co., Ltd.
International Classes:
H01L21/68; H02K41/02
Domestic Patent References:
JP2006162024A
JP3139159A
Foreign References:
WO2004059821A1
WO2007113955A1
Attorney, Agent or Firm:
Masanori Onishi



 
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