Title:
STAGE DEVICE
Document Type and Number:
Japanese Patent JPH0831728
Kind Code:
A
Abstract:
PURPOSE: To provide a stage device having a constitution suitable as a wafer stage for a scanning type aligner.
CONSTITUTION: A Y stage 41 is placed movably in the Y direction along linear guides 46a and 46b on a device base 46, an X stage 20 is put on movably in the X direction along linear guides 41a and 41b on the Y stage 41, and a wafer 17 is mounted on the X stage 20 through a wafer holder 19. The Y stage 41 is driven in the Y direction by moving magnet type linear motors 53A, 53B to the device base 46, and the X stage 20 is driven by a rotary motor 43 and a feed screw system using a feed screw 44, etc., to the Y stage 41.
Inventors:
SAKAMOTO HIDEAKI
Application Number:
JP16783094A
Publication Date:
February 02, 1996
Filing Date:
July 20, 1994
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F9/00; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F9/00
Attorney, Agent or Firm:
Satoshi Omori
Next Patent: SUPPLY METHOD OF DEVELOPER AND DEVELOPING DEVICE