STATE DEVICE, CHARGED PARTICLE RADIATION DEVICE, AND VACUUM DEVICE

Title:

STATE DEVICE, CHARGED PARTICLE RADIATION DEVICE, AND VACUUM DEVICE

Document Type and Number:

Japanese Patent JP2023167730

Kind Code:

A

Abstract:

To provide a stage device which can suppress an attitude error and also can rapidly determine a position, and a charged particle radiation device and a vacuum device which use the stage device.SOLUTION: The stage device includes: a sample setting unit for setting a target object to position; a scale plate used to measure a displacement of the sample setting unit in a vertical direction; and a lower-axis table for supporting the scale plate. A free supporting unit is provided between the scale plate and the lower-axis table.SELECTED DRAWING: Figure 5

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Inventors:

TAKAHASHI MUNEHIRO
MIZUOCHI MAKI
KATO TAKANOBU
NISHIOKA AKIRA

Application Number:

JP2022079130A

Publication Date:

November 24, 2023

Filing Date:

May 13, 2022

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP

International Classes:

H01J37/20; G12B5/00; H01J37/28

Attorney, Agent or Firm:

Polaire Patent Attorneys Corporation

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