Title:
ステージ装置およびリソグラフィ装置
Document Type and Number:
Japanese Patent JP4669868
Kind Code:
B2
Abstract:
A stage apparatus and a lithographic apparatus comprising such a stage apparatus are described. The stage apparatus includes an electromagnetic motor arranged to displace an object table, an electromagnetic actuator configured to position the object table and a device configured to provide a current to the stage apparatus such that, in use, an effect of a stray field of the electromagnetic motor on the electromagnetic actuator is at least partly compensated by the current.
Inventors:
Butler, hands
Application Number:
JP2007237580A
Publication Date:
April 13, 2011
Filing Date:
September 13, 2007
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20; H01L21/68; H02K41/03
Domestic Patent References:
| JP58175020A | ||||
| JP59025571A | ||||
| JP2000312465A | ||||
| JP2000316270A | ||||
| JP2001526878A | ||||
| JP2002125359A | ||||
| JP2002354779A | ||||
| JP2003037047A | ||||
| JP2003243282A | ||||
| JP2003509992A | ||||
| JP2004095658A | ||||
| JP2004516799A | ||||
| JP2005117049A | ||||
| JP2005223232A | ||||
| JP2006287015A | ||||
| JP2007116815A |
Foreign References:
| WO1999004481A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki