PURPOSE: To provide a highly accurate and inexpensive stage positioning control method by always controlling an optional coordinate of a stage in the same direction and at the same distance to the desired coordinates regardless of the present coordinates when the optional coordinates is moved to the desired one.

CONSTITUTION: When the present coordinates 1-4 set on a stage 22 are moved to a desired coordinates 6, a 1st shift coordinates 5 is set near the desired coordinates 6. Then, the coordinates 1-4 are moved to the coordinates 6 via the coordinates 5 regardless of the position of coordinates 1-4. In such a control way, the same direction and the same distance are always secured for the movement between both coordinates 5 and 6 regardless of the positions of coordinates 1-4. Therefore, the strain energy stored in a vacuum holding O-ring is set in the same direction and the same value. Thus, the errors have the same direction and the same value against the coordinates 6 despite the movement started from an optional coordinates. As a result, the error variance is reduced and the positioning accuracy is improved.