Title:
STAMPER, METHOD OF TRANSFERRING PATTERN USING IT, AND METHOD OF FORMING STRUCTURE BY TRANSFERRING PATTERN
Document Type and Number:
Japanese Patent JP3821069
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a stamper, a method of manufacturing it, and a method of transferring patterns, by which a specially fine pattern can be transferred at a low cost.
SOLUTION: The stamper has a substrate and a plurality of projecting sections formed on one surface of the substrate with different heights. Among the projecting sections, a high one is constituted by laminating at least two or more kinds of materials in at least two or more layers.
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Inventors:
Man Hasegawa
Akihiro Miyauchi
Akihiro Miyauchi
Application Number:
JP2002224327A
Publication Date:
September 13, 2006
Filing Date:
August 01, 2002
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/027; B29C33/42; B29C43/36; G03F7/00; (IPC1-7): H01L21/027
Domestic Patent References:
| JP3100942A | ||||
| JP61003339A |
Attorney, Agent or Firm:
Manabu Inoue