To provide a static fluid pressure bearing unit which is formed with a fluid film having a thickness necessary for maintaining bearing stiffness against disturbance load applied to the hydrostatic bearing to acquire stable bearing stiffness.
The static fluid pressure bearing unit has: a static pressure pocket; a fluid supplying unit for supplying pressurized fluid to the static pressure pocket; a fluid passage 13 from the fluid supplying unit to the static pressure pocket; a variable throttle 40 which is provided on one portion of the fluid passage 13, which has a diaphragm 43, a valve seat 45 and a throttling space 44b surrounded by the diaphragm 43 and the valve seat 45 and filled with pressurized fluid, and in which an aperture opening degree D between the diaphragm 43 and the valve seat 45, and the volume of the throttling space 44b are changed by deforming the diaphragm 43; a pressure detection unit for the static pressure pocket; a diaphragm deformation unit 50 for deforming the diaphragm 43; and a control unit for controlling the aperture opening degree D and the volume of the throttling space 44b through diaphragm deformation according to the detected pressure.
SUGIMOTO FUTOSHI
KUBO ATSUSHI
| JPH05306718A | 1993-11-19 | |||
| JP2006231483A | 2006-09-07 | |||
| JPH0349415U | 1991-05-14 | |||
| JPH03249425A | 1991-11-07 | |||
| JPH05306718A | 1993-11-19 |
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