Title:
STATIC PRESSURE AIR BEARING TYPE GUIDE DEVICE
Document Type and Number:
Japanese Patent JP3098421
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To diminish the fluctuation of a movable body in compressed air supplying/cutting off periods by cutting off supply of compressed air to an auxiliary air pad while continuing the supply of a compressed air to a reference air pad when a bearing side and a shaft side are relatively stopped.
SOLUTION: A reference air pad 54 is supported by the reference shaft 53 of one side 52a of a moving body 52, an auxiliary shaft 55 of the other side 52b of the moving body 52 is supported by a plate spring 55a, and an auxiliary air pad 56 is supported by the auxiliary shaft 55. A tube 61 connected to the reference air pad 54 is connected a solenoid valve 63, and a tube 62 connected to the auxiliary air pad 56 is connected to the solenoid valve 63 through a solenoid valve 64 so as to supply compressed air to the solenoid valve 63. When a bearing side and a shaft side are relatively stopped, if compressed air may not be supplied to the auxiliary air pad 56 while being supplied to the reference air pad 54, the auxiliary air pad 56 is brought in contact with a guide block 51 side by energization force and stopping rigidity is increased. However, a clearance δ is retained between the reference air pad 54 and the guide block 51, therefore the same condition as a movable condition can be retained.
Inventors:
Kazuo Nakajima
Application Number:
JP9966096A
Publication Date:
October 16, 2000
Filing Date:
March 29, 1996
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
F16C32/06; (IPC1-7): F16C32/06
Domestic Patent References:
| JP8303463A |