To provide a stage device for vacuum which can reduce working costs while maintaining high exhaust efficiency and prevents the occurrence of connection errors during assembling.

The static pressure gas bearing device has an air bearing for supporting a structure in a non-contacting state and exhausting grooves of a plurality of stages surrounding around the air bearing. The exhausting grooves of a plurality of stages have an independent exhaust passage respectively. The exhaust passage is connected to a vacuum pump outside a vacuum chamber via a feed-through opened to the wall of the vacuum chamber to which a vacuum stage is installed. Further, when it is consecutively numbered as a first stage, a second stage, a third stage, ..., and an n-th stage from the exhausting groove close to the static pressure gas bearing, at least the conductance of the exhaust passage in the exhausting groove of the outermost n-th stage is made larger than that of in the exhausting groove of the first stage closest to the static pressure gas bearing.