PURPOSE: To aim at enhancing the accuracy of a bearing, by inclining nozzles in a turbine motor part for driving a rotary shaft to cancel out axial force which is produced by the supply of pressure gas to the nozzles in the direction toward the rotary shaft.

CONSTITUTION: Since nozzles in a turbine are arranged such that the nozzles are not orthgonal to holes and have nozzle blow-off ports 71 which are inclined toward the axial direction, the pressure of blow-off from the nozzles serves as reaction force to hold equilibrium even if the supply pressure of pressurized gas is introduced into a flange part 42, and therefore, the displacement of a rotary shaft 41 in the axial direction may be restrained. That is, the position of a wheel is not changed, thereby an article with desired accuracy of a widthwise dimension may be obtained.