To provide a static pressure gas bearing linear guide device for enabling stable and efficient support of a load in no contact when positioning a movable body moved along a guide rail, while achieving the lighter weight, higher production efficiency and lower cost of the guide rail.
On the guide rail 2 having rail structures 6S, 6T combined with each other so that recessed portions 6g formed along one direction are aligned in the same direction, first and second guide faces 6c, 6b extending along one direction are disposed perpendicular to each other. The movable body 4 includes a first bearing pad 4a opposed to the first guide face 6c, and a second bearing pad 4b opposed to the second guide face 6b. Pressurized gas is injected and introduced from gas jet parts 8 of the bearing pads 4a, 4b between the movable body 4 and the guide rail 2, and thus the movable body 4 can be moved along the guide rail 2 in no contact.
JP2010025224A | 2010-02-04 | |||
JP2009281506A | 2009-12-03 | |||
JPH09222124A | 1997-08-26 | |||
JPS601422A | 1985-01-07 |