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Patent Searching and Data


Title:
STATIC PRESSURE GAS BEARING SPINDLE
Document Type and Number:
Japanese Patent JP2002089563
Kind Code:
A
Abstract:

To provide a static pressure gas bearing spindle particularly suitable for use in a vacuum, having a rotating shaft 6 supported within a housing 4 by use of a compressed gas without contact, and sufficiently reducing the leakage of bearing exhaust to the outside.

Non-contact seals 22 and 23 are provided between the housing 4 and the rotating shaft 6 within a passage extending from the exterior of the housing 4 to a bearing clearance 3, with a microscopic sealing gap between the seals. At least one of rotating and fixed sealing surfaces which constitute the seals 22 and 23, respectively, is made of a material excellent in sliding characteristic whereby even if the rotating sealing surface and the fixed sealing surface which constitute the sealing gap are brought into contact with each other by some cause, damage to the sealing surfaces can be reduced and the microscopic sealing gap can be maintained even after their contact so as to enable use of the sealing gap in reduced size.


Inventors:
ITO TAKANOBU
Application Number:
JP2000283683A
Publication Date:
March 27, 2002
Filing Date:
September 19, 2000
Export Citation:
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Assignee:
NTN TOYO BEARING CO LTD
International Classes:
F16C32/06; (IPC1-7): F16C32/06
Attorney, Agent or Firm:
Bunji Kamata (2 outside)