To provided a static pressure gas bearing structure that is robust against load variations and enables reduction in size and weight of a mounted device.
An air bearing 1 comprises: a magnetic-force generating part 11 that generates a magnetic force which attracts a mating member; a compressed-air supply part 12 that is arranged around the magnetic-force generating part 11 and discharges compressed air toward the mating member; a base plate 13 to which the magnetic-force generating part 11 and the compressed-air supply part 12 are attached; and a ball joint 14 that allows the inclination of the air bearing 1 to be freely adjustable while holding the same. The magnetic-force generating part 11 is a permanent magnet, such as a neodymium magnet, formed into a columnar shape. The compressed-air supply part 12 is a disk-shaped member with a through-hole 123 formed in the center. The magnetic-force generating part 11 is fitted into the through-hole 123. One end surface 121 of the compressed-air supply part 12 and one end surface 111 of the magnetic-force generating part 11 fitted into the through-hole 123 together constitute a support surface 10 that faces the surface of the mating member contactlessly.
JPH11210748A | 1999-08-03 | |||
JP2010060013A | 2010-03-18 |
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