Title:
静圧スライダ
Document Type and Number:
Japanese Patent JP4535991
Kind Code:
B2
Inventors:
Takashi Kobayashi
Application Number:
JP2005343734A
Publication Date:
September 01, 2010
Filing Date:
November 29, 2005
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
F16C32/06; G01B7/30; G01B11/26; H01L21/027; H01L21/68
Domestic Patent References:
| JP2004060833A | ||||
| JP2004119426A | ||||
| JP2003191140A | ||||
| JP9250544A | ||||
| JP2003343561A | ||||
| JP8229759A | ||||
| JP2001325026A |