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Patent Searching and Data


Title:
STATIC PRESSURE STAGE DEVICE
Document Type and Number:
Japanese Patent JP2013249930
Kind Code:
A
Abstract:

To provide a static pressure stage device that can suppress variation of a bearing gap associated with variation of the supply pressure of a pressurizing fluid.

A static pressure stage device 100 has: fluid supply pipes 31a, 31b connected to a fluid supply source for supplying fluids from the fluid supply source 50; a base 11 having a guide face 12; and a moving body 21 in which a static pressure bearing is arranged so as to oppose the guide face, and fluid passages 30a, 30b for supplying fluids to the static pressure bearing are formed. The fluid passages communicate with the fluid supply pipes and receive fluids from the fluid supply pipes, throttle parts 23a, 23b are arranged at the fluid passages, a bearing gap d2 is defined between the static pressure bearing and the guide face of the base while fluids are supplied to the static bearing from the fluid passages via the throttle parts, and fluid basins 24a, 24b are arranged at the moving body so as to communicate with the fluid passages at the upstream side of the throttle parts, and to form a gap d1 in communication with the outside between the fluid supply passages.


Inventors:
NAKASU YOSHIHIRO
Application Number:
JP2012126696A
Publication Date:
December 12, 2013
Filing Date:
June 04, 2012
Export Citation:
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Assignee:
CANON KK
International Classes:
F16C32/06
Domestic Patent References:
JPH07103235A1995-04-18
JP2001248643A2001-09-14
JPH0246117U1990-03-29
JPH0441142A1992-02-12
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka