Title:
光架橋基を有するポリエーテル樹脂を含む段差基板被覆組成物
Document Type and Number:
Japanese Patent JP7303495
Kind Code:
B2
Abstract:
wherein R1 is a C1-10 alkylene group, a C1-10 alkenylene group, a C1-10 alkynylene group, a C6-40 arylene group, an oxygen atom, a carbonyl group, a sulfur atom, —C(O)—O—, —C(O)—NRa—, —NRb—, or a group including a combination thereof, R2 is a hydrogen atom or a C1-10 alkyl group.
Inventors:
▲徳▼永 光
Takafumi Endo
Keisuke Hashimoto
Rikimaru Sakamoto
Takafumi Endo
Keisuke Hashimoto
Rikimaru Sakamoto
Application Number:
JP2019511211A
Publication Date:
July 05, 2023
Filing Date:
March 30, 2018
Export Citation:
Assignee:
Nissan Chemical Co., Ltd.
International Classes:
G03F7/11; C08F2/48; C08F16/32; C08F120/30; G03F7/20; G03F7/26; H01L21/027
Foreign References:
| WO2012050064A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Hanabusa Patent and Trademark Office
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