Title:
STICKING SYSTEM, EXFOLIATION SYSTEM, TRANSFER SYSTEM, PRINT SYSTEM, STICKING METHOD AND EXFOLIATION METHOD OF TABULAR BODY
Document Type and Number:
Japanese Patent JP2018046097
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve productivity by shortening the tact time of sticking process or exfoliation process.SOLUTION: A sticking system of a tabular body includes: a sticking device for forming an adhesion body by sticking a first tabular body and a second tabular body; a first transport device for accessing the sticking device, and executing carry-out of the adhesion body from the sticking device and carry-in of the first tabular body to the sticking device; and a second transport device for accessing the sticking device, and executing carry-in of the second tabular body to the sticking device. After carrying out the adhesion body from the sticking device, the first transport device carries in another first tabular body different from the first tabular body composing the adhesion body, in the sticking device. The second transport device carries in another second tabular body different from the second tabular body composing the adhesion body, in the sticking device while overlapping, in time, at least one of carry-out of the adhesion body and carry-in of the other first tabular body.SELECTED DRAWING: Figure 3
Inventors:
TANAKA TETSUO
UENO HIROYUKI
UENO HIROYUKI
Application Number:
JP2016178522A
Publication Date:
March 22, 2018
Filing Date:
September 13, 2016
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
H01L21/677; B41F17/14; H01L21/683
Domestic Patent References:
| JP2016040099A | 2016-03-24 | |||
| JP2014053464A | 2014-03-20 |
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi
Kazumasa Onishi