To provide a space-saving and efficient stocker.
In the inside of the main part, the stocker is equipped with a carrying-in port 14/carrying-out port 15 for taking-in/taking-out a cassette 6, a shelf 23 for keeping the cassette 6, and a stocker robot 9 for taking-in/taking-out the cassette 6 from the shelf 23. A standby area 38 for the carrying-in port is formed in the vertical directional vicinity of the carrying-in port 14, and a standby area 39 for carrying-out port is formed in the horizontal directional vicinity of the carrying-out port 15. It comprises respectively a rise-and-fall unit 11 to which vertical migration of the cassette 6 is carried out between the carrying-in port 14 and the standby area 38 for carrying-in ports, and a horizontal driving unit 3 to which horizontal movement of the cassette 6 is carried out between the carrying-out port 15 and the standby area 39 for taking-out ports. The stocker robot 9 performs taking-in/taking-out of the cassette 6 among the standby area 38 for carrying-in port and the standby area 39 for taking-out port, and the shelf 23.
Makoto Suhara
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