To provide a storage cabinet for storing and delivering cargos such as an FOUP (Front Opening Unified Pod) for storing, for example, various substrates for manufacturing semiconductor elements with a conveying vehicle such as OHT (Overhead Hoist Transport) efficiently by a simple configuration.
The storage cabinet (10) includes: a body unit whose inside is vertically divided in a plurality of stages, and which has entrances capable of taking out and putting in the cargos (3) at respective stages of the plurality of stages so that they are aligned in the vertical direction; a plurality of mounting parts (21) capable of mounting the cargos at the plurality of stages in the body unit and moving the cargos horizontally between the stages; a common storing and delivering port for the plurality of stages which vertically moves along the entrances at the plurality of states; a vertically moving means (12) that can vertically move the storing and delivering port; and an outside/inside moving means (16) for horizontally moving the cargos between the one mounting part adjacent to the entrance at the plurality of stages and the storing and delivering port moved to the position opposite to the mounting part.
Satoshi Nakamura
Sadao Kumakura
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