Title:
STORAGE DEVICE
Document Type and Number:
Japanese Patent JP2019054208
Kind Code:
A
Abstract:
To provide a storage device where a contact resistance is reduced.SOLUTION: A storage device according to an embodiment includes: a wiring; an electrode including a first portion, which is provided on the wiring and is electrically connected to the wiring, and a second portion, which is provided on the first portion and is electrically connected to the first portion; a first pillar provided in the second portion; a second pillar provided in the second portion; a first conductive layer provided below the first pillar and electrically connected to the first pillar while extending in a first direction; and a second conductive layer provided below the second pillar and electrically connected to the second pillar while extending in the first direction. The second portion includes: a first conductive part provided around the first pillar and containing a first conductive material; a second conductive part provided around the second pillar and containing the first conductive material; and a third conductive part provided around the first conductive part and the second conductive part, containing a second conductive material, and electrically connected to the first portion, the first conductive part, and the second conductive part. The first portion contains the second conductive material.SELECTED DRAWING: Figure 4
Inventors:
SAKAMOTO KEI
Application Number:
JP2017178986A
Publication Date:
April 04, 2019
Filing Date:
September 19, 2017
Export Citation:
Assignee:
TOSHIBA MEMORY CORP
International Classes:
H01L21/8239; H01L27/105; H01L45/00; H01L49/00
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama